French P.
Delft University of Technology, NL
Keywords: microsystems, scaling, smart sensors
Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. In some cases the scaling works against us leading to lower performance. We should also consider reducing the size of the system, through integration and optimisation. It is therefore important to consider the benefits of miniaturisation for each application and either reduce the size of the structures in the system, or integrate the system to reduce size. This paper discusses the effects of scaling both devices and systems.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 1 - 4
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 1-4200-6184-4