Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology

, ,

Keywords: , ,

A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry.

PDF of paper:

Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 8, 2005
Pages: 695 - 697
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-1-4