Liu J.F., Hsu Y.J., Chen J.H., Chen S.Z., Huang F.S., Chen J.H., Chen S.Z.
National Tsing Hua University, TW
Keywords: HSQ, imprinting, nano imprint lithography, nano-wire, transfer
In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable diluted/prebake process of HSQ were also investigated to have effective transferring condition. The Au nano-wires transferring results were also investigated by using SEM photography and optical microscope.The Au mold, nano-wires with the width is about~ 150-200 nm.The low pressure and low temperature imprinting process with the optimum condition of dilute HSQ to succeed transfer Au nano-wire from mold to HSQ. This technology is suitable for the future flexible electronics application.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 271 - 274
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Printed & Flexible Electronics
ISBN: 0-9767985-2-2