Application of MCLC Method for Estimating the Parameters of MEMS Sensors

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An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system’s output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 335 - 338
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9767985-2-2