Rocha L.A., Cretu E., Wollfenbuttel R.F.
Delft University of Technology, NL
Keywords: large-signal analysis, MEMS dynamics, pull-in, squeeze-film damping
A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region (almost 90% of the pull-in time), the modeling of this region largely determines the reliability of the overall calculation of the pull-in dynamic transition. An analytical model for this region is derived and compared with measurements. The model accuracy, despite its simplicity, makes it a valuable tool for the design of MEMS switches outside vacuum and for sensors based on measuring pull-in time.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 271 - 274
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4