Lee K.B., Cho Y-H
Korea Advanced Institute of Science and Technology, KR
Keywords: electrostatic actuation, electrostatic field, finite element simulation, repulsive force
We analyze and characterize the laterally induced electrostatic repulsive force generated by the in-plane asymmetry of electrostatic field. Basic concept of the electrostatic repulsive actuation is presented. Fundamental nature of the repulsive force has been characterized by the finite element analysis of the electrostatic field for varying electrode geometry. A simple analytic force curve has been derived from the fittina of the finite element results. The theoretical simulation results are compared well with the experimental values, measured from the microfabricated test structures: thereby demonstrating $he validity and usefulness of the analytic formulae derived from the finite element simulation.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 218 - 221
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3