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Keywords: top-down

DNA Double-Write Photolithography: A Synergy for Top-Down and Bottom-Up Nanofabrication

Heller M.J., Song Y., University of California San Diego, US
Intrinsic programmability and other unique properties of DNA allow it to be used as a self-assembly nanostructure material, easily functionalized with nanoparticles and other entities, and as a UV sensitive write material for patterning. Thus, [...]

Increased Piezoresistive Effect in Crystalline and Polycrystalline Si Nanowires

Reck K., Richter J., Hansen O., Thomsen E.V., Technical University of Denmark, DK
This paper presents measurements of the size and doping dependence of the piezoresistive effect in top-down fabricated p-type crystalline and polycrystalline silicon nanowires. Test chips with 6 differently sized piezoresistors and integrated contacts for electrical [...]

Vertically aligned carbon nanowires (CNWs): Top-down approach using photolithography and pyrolysis

Lee J.A., Lee S-W., Lee S.S., Lee J.A., Lee S-W., Lee S.S., Lee J.A., Lee S-W., Lee S.S., Korea Advanced Institute of Science and Technology (KAIST), KR
Top-down approach for vertically aligned CNWs has not reported yet although it is necessary for immediate integration of CNWs with micro and nano systems. In this paper, vertically aligned pyrolyzed carbon nanowires (CNWs) is fabricated [...]

Label-Free Protein Nano-Biosensor Using Top-Down Fabrication

Ah C.S., Ahn C-G, Kim A., Yu H.Y., Ahn C-G, Yang J.H., Baek I-B, Park C.W., Jun M.S., Lee S.J., Electronics and Telecommunications Research Institute (ETRI), KR
A nanosensor of n-type Si field-effect transistor (FET) via “top-down method” was employed to monitor PSA with great selectivity and high sensitivity up to 10 pg/mL. When a biomaterial, negatively charged PSA, is introduced through [...]

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