test structure – TechConnect Briefs

Measuring the layer thickness of MEMS using torsional resonance

Andrews N.D., Clark J.V., Purdue University, US

In this work we propose a method to measure the structural layer thickness of MEMS using torsional resonance. The thickness of structures often has measurable influences on the mechanical, thermal, and electrical behaviors. Measurement of [...]

A Setup for Automatic MOSFET Mismatch Characterization under a Wide Bias Range

Klimach H., Galup-Montoro C., Schneider M.C., Federal University of Santa Catarina, BR

Mismatch is the denomination of time-independent variations between identically designed components. In analog circuits, the spread in the dc characteristics of supposedly matched transistors results in inaccurate or even anomalous circuit behavior. Also, for digital [...]

Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors

Romes W., Muchow J., Finkbeiner S., Franz J., Schatz O., Trah H-P., Robert Bosch GmbH, DE

The signal formation in piezoresistive silicon pressure sensors has been studied for many years and is very well understood meanwhile. Nevertheless there are higher order effects of nonideal behaviour such as nonlinearities and hys-teresis effects [...]