SU-8 – TechConnect Briefs

A simple process for selective bio-functionalization of SU-8 surface for Lab-on-a-Chip applications

Srinivasan B., Chaurasia D., Vanjari S., Singh S., Indian Institute of Technology - Hyderabad, IN

SU-8 is a popular epoxy based negative photoresist developed by IBM. It has been widely used as structural material in Bio-MEMS and Lab-on-a-Chip devices due to its bio-compatible properties. SU-8 surface has hydrophobic nature. Often [...]

A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications

Nubile A., Poggi A., Cozzani E., Elmi I., Zampolli S., Messina M., Cardinali G.C., Mancarella F., Belluce M., CNR, IT

Microvalves are basic components of microfluidic systems and MEMS technology has provided an opportunity for microvalves to be packaged onto a board with integrated microfluidic channels. For the successful miniaturization of integrated fluidic devices, it [...]

Pneumatically driven Auxiliary Micro Tools for Desktop Factories

Hoxhold B., Büttgenbach S., Technische Universität Braunschweig, DE

This paper presents the design and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro [...]

Fabrication of 3D carbon microelectrodes for Li-Ion battery applications

Turon Teixidor G., Wang C., Madou M.J., University of California Irvine, US

The fabrication of very high-aspect ratio 3D carbon microelectrodes for Li-Ion batteries is presented. Using a pyrolysis process under inert conditions, thick layers of patterned SU-8 photoresist (up to 700 ?m in height) are converted [...]

Regular Nano-Pores Fabricated By UV Cross-Linking Non-softbaked SU-8 Resist In a Solvent Evaporation Controlled Environment

Chang C-J, Tseng F-G, Yang C-S, National Tsing Hua University, TW

This paper proposes a novel technology to fabricate 3D nano pore structures in SU-8 resist, a widely employed resist in MEMS and Bio-chips. Controlling the evaporation rate in SU-8 fabrication process, regular porous structures with [...]

Microscope Slide Electrode Chamber for Nanosecond, Megavolt-Per-Meter Biological Investigations

Sun Y., Vernier P.T., Behrend M., Marcu L., Gundersen M.A., University of Southern California, US

Nanosecond pulsed electric fields pass through the external membranes of biological cells (which have typical response times much greater than nanoseconds) and perturb fast-responding intracellular structures and processes. To enable real-time imaging and investigation of [...]

Fabrication of High Quality PZT Thick Film Using Lift-Off Technique

Zhao H.J., Ren T.L., Liu J.S., Liu L.T., Liu J.S., Liu L.T., Li Z.J., Liu J.S., Liu L.T., Institute of Microelectronics, Tsinghua University, CN

Lead-zirconate-titanate (PZT) is a typical ferroelectrical material with outstanding properties. The demand for the thickness of PZT films used in MEMS is usually over 1_m due to the advantages of the thick thin films, so [...]