step – TechConnect Briefs

Step and Repeat UV Imprint Process Technology for Wafer-Scale Nano-Manufacturing

Watts M., Truskett V., Choi J., Mackay C., McMackin I., Schumaker N., Schumaker P., Babbs D., Sreenivasan S.V., Schumaker N., Schumaker P., Molecular Imprints, Inc, US

The Step and Flash Imprint Lithography (S-FILTM) process is a step and repeat nano-replication technique based on UV curable low viscosity liquids. S-FIL uses field-to-field drop dispensing of the UV curable liquids for the step [...]

Step and Flash Imprint Lithography Using UV-transparent, Electrically Conductive Templates

Hooper A., Talin A.A., Dauksher W.J., Baker J.H., Convey D., Eschriech T., Resnick D.J., Bailey T.C., Johnson S., Willson C.G., Motorola Labs, US

Step and flash imprint lithography (SFIL) is a promising new technique capable of resolving sub 100nm features at a substantially lower cost than any other candidate method currently under development. Successful implementation of SFIL requires [...]

A Program for Modeling of Technological Routes of VLSI Fabrication – ProMIC-T

Tesluk V., Korbetskyy O., Lvov Polytechnic, UA

A technological process of the VLSI fabrication constantly improves. In such conditions, new technology and constructive problems appear when making IC with submicron sizes. Decision for these problems is possible only by using CAD tools, [...]