Step and Repeat UV Imprint Process Technology for Wafer-Scale Nano-Manufacturing
Babbs D., Choi J., Mackay C., McMackin I., Schumaker N., Schumaker P., Sreenivasan S.V., Truskett V., Watts M., Molecular Imprints, Inc, US
The Step and Flash Imprint Lithography (S-FILTM) process is a step and repeat nano-replication technique based on UV curable low viscosity liquids. S-FIL uses field-to-field drop dispensing of the UV curable liquids for the step [...]