RF-MEMS – TechConnect Briefs

Modeling the effect of the increase in the actuation voltage

Jamshidzade M., Cassles J., University of Barcelona, ES

In the past few years many reports have demonstrated the development of RF-MEMS switches considering the mechanical, electrical and chemical behaviors separately. However there are a few works which address the whole aspects of RF-MEMS [...]

On the investigation of an interdigitated, high capacitance ratio shunt RF-MEMS switch for X- band applications

Angira M., BITS PILANI, IN

This paper presents a novel, highly compact capacitive shunt RF MEMS switch. In the presnted switch, interdigitation of signal lines with actuation electrodes. are used. The compactness has been achieved further by incorporating the HfO2 [...]

Electromechanical and Electromagnetic Simulation of RF-MEMS Complex Networks Based on Compact Modeling Approach

Iannacci J., Faes A., Kuenzig T., Niessner M., Wachutka G., Fondazione Bruno Kessler - FBK, IT

RF-MEMS, i.e. MicroElectroMechanical-Systems for Radio Frequency applications, have been attracting the interest of the scientific community for more than one decade, thanks to their high performance and large reconfigurability. The employment of RF-MEMS based devices [...]

Design and Analysis of FBAR switches for RF Front-End Mobile Terminal

Chawla P., Khanna R., kurukshetra institute of technology and management, IN

In this paper, an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of mobile terminal are presented. Such RF MEMS switches have displayed excellent RF characteristics, [...]

Reconfigurable RF Front End Section of Mobile

Chawla K., Chawla P., Saluja N., Chawla K., Chawla P., Gupta N., Chhikara A., Kaur K., Suman S.K., KITM,kurukshetra, IN

In this proposal, the application of MEMS technology with a focus on RF applications in the design of next generation mobile terminal is taken up. RF MEMS switches have displayed excellent RF characteristics, including lower [...]

Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers

Maninder K., Central Electronics Engineering Research Institute, IN

This paper presents the electrical performance comparison of Symmetric Toggle RF MEMS Switch (STS), by incorporating hafnium oxide (HfO2) as a dielectric material instead of silicon dioxide (SiO2). Fig. 1(a) and (b) shows the 3-D [...]

A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications

Iannacci J., Faes A., Mastri F., Masotti D., Rizzoli V., Fondazione Bruno Kessler - FBK, IT

We propose the implementation of a widely reconfigurable broad-band power attenuator for Radio Frequency (RF) and Microwave signals, entirely based on the RF-MEMS surface micromachining technology available at FBK in Italy. The network realizes a [...]

Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer

Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

Micro-fabricated sensors made of a 20 µm thick bulk-silicon device layer for electrostatic voltage measurements are presented. A rotational, seesaw-like actuator with two electrically isolated electrodes on its ends forming parallel-plate capacitors with opposing electrodes [...]

Simulation of Constant-Charge Biasing Integrated Circuit for High Reliability Capacitive RF MEMS Switch

Choi K.H., Lee J.B., Goldsmith C.L., The University of Texas at Dallas, US

This paper provides simulation results for a constant-charge biasing IC for capacitive RF MEMS switches to drastically improve reliability. It is well known that there are some forefront issues for RF MEMS switches to be [...]

Modeling and Design of Electrostatic Voltage Sensors Based on Micromachined Torsional Actuators

Dittmer A., Dittmer J., Dittmer A., Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

The optimization of design parameters and methods for electrostatic voltage sensors based on torsional actuators is presented. The analytical software model used for this optimization process is discussed and compared to measurement results. Voltage excitation [...]