Diamond Materials for MEMS and NEMS Structures and Devices
Butler J.E., Feygelson T., Sekaric L., Craighead H., Wang J., Nguyen C.T.-C., Naval Research Laboratory, US
Diamond materials offer great potential for many MEMS and NES applications. Amongst the attractive technological properties of diamond materials are the high stiffness, thermal conductivity, optical transparency range, chemical stability and erosion resistance, and dopant [...]