quality factor – TechConnect Briefs

Silicon Crystal Effects in Modeling of MEMS Silicon Resonators

Ghaffari S., Ahn C.H., Ng E.J., Kenny T.W., Stanford University, US

Silicon has found considerable application in precision MEMS devices because it provides desirable high frequency and quality factor characteristics. Usually, MEMS resonators are built from single crystal silicon with proven long-term stability. It is experimentally [...]

Simulations of the Anchor Losses in MEM Disk Resonators

Paci D., Stoffels S., Tilmans H.A.C., IMEC, BE

MEM (Micro Electro Mechanical) resonators have been proposed as fundamental components in RF transmission systems; especially bulk mode resonators are very attractive devices because of their small size and their high resonance frequencies combined with [...]

Characterization and Modeling of Silicon Tapered Inductors

Peng A.S., Chen H.Y., Chen K.M., Huang G.W., Wang S.C., Chen H.Y., Chen K.M., Chang C.Y., National Nano Device Laboratories, TW

The characteristics of tapered inductors and standard inductors have been compared, and an improved compact model for tapered inductors is presented. The measured data of spiral inductors shows that the tapered inductor has higher quality [...]

Mechanical Damping due to Interface Motion in Micro-Resonators

Pawaskar D.N., Phillips R., California Institute of Technology, US

Mechanical damping strongly influences the sensitivity and resolution of nano-sensors and actuators. In this paper, we have investigated one of the key intrinsic mechanisms responsible for dissipation of vibrational energy in beams composed of a [...]

Keywords: quality factor

Silicon Crystal Effects in Modeling of MEMS Silicon Resonators

Simulations of the Anchor Losses in MEM Disk Resonators

Characterization and Modeling of Silicon Tapered Inductors

Mechanical Damping due to Interface Motion in Micro-Resonators

Low Damping Differential-Capacitive Sensing Comb

Development of a MEMS Vertical Planar Coil Inductor

A Simple and Scalable Model for Spiral Inductors on Silicon