process simulation – Page 2 – TechConnect Briefs

Numerical Simulations of Sputter Deposition and Etching in Trenches Using the Level Set Technique

O'Sullivan P.L., Baumann F.H., Gilmer G.H., Bell Laboratories, Lucent Technologies, US

We have performed 2D and quasi-3D numerical simulations of physical vapor deposition (PVD) into high aspect ratio trenches used for modern VLSI interconnects. The topographic evolution is modeled using (continuum) level set methods. The level [...]

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing

Tatsumi T., Ansai H., Mukai M., Komatsu Y., Sony Corporation, JP

We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called [...]

A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation

Wilson N.M., Liang S., Pinsky P.M., Dutton R.W., Stanford University, US

This paper details a technique that exploits domain decom-position and utilizes a combination of 1-D, 2-D, and 3-D process simulation to build physically accurate geometry of micro-electro-mechanical systems (MEMS) for simula-tion. The size and aspect [...]

Challenges in Process Modeling for MEMS

Dutton R.W., Chan E.K., Wilson N.W., Hsiau Z-K, Shen S., Stanford University, US

The potency of the silicon IC technology base, its use of CAD for design targeted for manufacturing and the related challenges faced in deployment of MEMS are discussed. The rapidly growing field of MEMS has [...]