photoresist – TechConnect Briefs

Effects of Solvents on Dissolution of Photoresist in Parylene Microchannels

Ceylan Koydemir H., Kulah H., Ozgen C., Tosun I., Middle East Technical University, TR

This paper presents a detailed study for the effects of different types of solvents on dissolution of photoresist inside the parylene micro-channels, for the first time. Experimental results indicate that photoresist dissolution in dipolar aprotic [...]

Microfabrication and Mechanical Characterization of Suspended Carbon Microstructures

Malladi K., Wang C., Madou M.J., Xue W., Cui T., University of California Irvine, US

The idea of suspended carbon micro/nanostructures has been researched by a few research groups ], however, controlled fabrication of suspended carbon micro/nano structures in desired positions and with the desired shape and dimension is still [...]

Fabrication of Suspended C-NEMS Structures by EB Writer and Pyrolysis Method

Malladi K., Wang C., Madou M., University of California Irvine, US

Recently suspended C-MEMS structures were fabricated by accurately controlling the processing parameter. However how to fabricate various suspended C-NEMS structures is still a big challenge. Here we successfully fabricated C-NEMS by UV/EB lithography and pyrolysis [...]