network-type modeling – TechConnect Briefs

Modeling of Electrostatic MEMS Components

Lorenz G., Neul R., Dickmann S., Robert Bosch GmbH, DE

This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R [...]

Network-Type Modeling of Micromachined Sensor Systems

Lorenz G., Neul R., Robert Bosch GmbH, DE

This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared [...]