nano imprint lithography – TechConnect Briefs

Influence of resist composition on demolding force in UV nanoimprint lithography

Amirsadeghi A., Lee J., Park S., Louisiana State University, US

We investigated the influence of the Young’s Modulus (E) of UV resist on the measured demolding force in UV-NIL by varying compositions of UV-curable polymers. We found that decreasing crosslinking content of the polymers decreases [...]

Analysis of the Liquid Mediated Friction during Alignment in NIL Process

Kang S-H, Park S.H., Lee W.I., Seoul National University, KR

When Nano-Imprint Lithography (NIL) process is adopted in the large area applications like display, the stiction phenomenon which is the adhesion or in-plane friction between mold and substrate to disturb fine alignment process can be [...]

Analysis of density variation for different temperatures in thermal nano imprinting process

Lee D.E., Lee H.J., Lee W.I., Lee D.E., Lee H.J., Lee W.I., Choi S-W, Lee D.E., Lee H.J., Lee W.I., Seoul National University, KR

Density variation of the polymer resist for different temperatures in thermal nano imprinting1 process was studied by both experiments and molecular dynamics (MD) simulations. After patterning, we estimated the local density by measuring the pull-off [...]

Au Nano-Wire Transferring onto HSQ by Nano Imprinting Technology

Liu J.F., Hsu Y.J., Chen J.H., Chen S.Z., Huang F.S., Chen J.H., Chen S.Z., National Tsing Hua University, TW

In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable [...]