Polysilicon Nano-wires Based Nano-device on Silicon Chip: Fabrication and its Application
Mishra N.N., Winterrowd P., Nelson R., Maki G., Maki W.C., Rastogi S.K., Cameron E., Filanoski B., Maki G., Maki W.C., University of Idaho, US
5x5 arrays of six nano-transistor devices were fabricated on p-type silicon/silicon oxide (200nm) wafers with resistivity 1-100 -cm. 50nm of doped polysilicon were deposited and annealed to make nanowires. All nanowires were made with direct [...]