MST – TechConnect Briefs

Global MEMS Equipment and Materials Markets and Opportunities

Sheet L., SEMI, US

The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. [...]

MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000

Gutierrez A., Aceto S., Simkulet M., Patti D., Liendhard M., Krawczyk T., Lundgren A., InterScience, Inc, US

We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution [...]

A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems

Zaman M.H., Bart S.F., Rabinovich V.L., Ghaddar C.K., Tchertkov I., Gilbert J.R., Microcosm Technologies, Inc., US

This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]