MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000

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We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution surface profiling across the whole surface of a wafer. It can also be used to study motion of micro devices, both in-plane and out-of-plane. The system uses non-contact laser probing and automated navigation across a wafer. The system is at present fully functional and being benchmarked against a wide variety of test devices.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 210 - 213
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6