Stress Optimization of a Micromechanical Torsional Spring
Klose T., Kunze D., Sandner T., Schenk H., Lakner H., Schneider A., Schneider P., Schneider A., Schneider P., Fraunhofer IPMS, DE
In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the [...]