MOEMS – TechConnect Briefs

Multi-cantilever array sensor system with MOEMS read-out

Bieniek T., Instytut Technologii Elektronowej, PL

Cantilever beams-based sensor systems become a sensor family applicable in several high-end technology research areas. The outstanding sensitivity and phenomenon selectivity of such systems profits from functionalization technique available for cantilever beams surface. High selectivity [...]

Precision Micro-Optical Elements for Manufacturing of Gas Sensors using IR-Absorption

Quenzer H.-J., Janes J., Stenchly V., Schwarzelbach S., Wagner B., Dudde R., Fraunhofer Inst. Silicon Technology, DE

A new process technology has been developed by Fraunhofer Institute Silicon Technology for manufacturing precise optical components from borosilicate glass by eight inch wafer batch processing. Glass forms are produced by a contact-less glass flow [...]

Optimization of Diffractive MEMS for Optical Switching

Verheggen J., Panaman G., Khan Raja W., Castracane J., University at Albany-SUNY, US

Micro-Opto-Electro-Mechanical Systems (MOEMS) have found many applications in the fields of communication, spectroscopy, and displays. MOEMS devices based on dynamic diffractive elements are currently investigated at CNSE. The possible applications include: optical switching, signal monitoring, [...]

Debunking an Urban Legend: Uniformity in Edge-Lit Frustrated TIR Displays

Selbrede M.G., Uni-Pixel Displays, Inc., US

Field sequential color display systems that utilize frustrated total internal reflection to activate pixels offer tremendous advantages over existing display technologies. Among these advantages are display transparency, imaging of infrared and visible light on the [...]

Performance Tradeoffs in MEMS Sensors with High-Finesse Fabry-Perot Interferometry Detection

Eklund E.J., Shkel A.M., University of California Irvine, US

A detailed analysis with experimental verification is presented for optical MEMS sensors based on Fabry-Perot interferometers (FPI). These sensors consist of two partially transparent parallel plates with reflective inner surfaces, forming a cavity with an [...]

Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation

Forest C.R., Reynolds-Brown P., Blum Spahn O., Harris J., Novak E., Wong C.C., Mani S., Peter F., Adams D., Sandia National Laboratories, US

A two-position micro-optical switch is being developed at Sandia National Laboratories. This MEMS device is shown in Figure 1 as a gear with a through-hole; the actuation mechanism is not shown. In the "on" position, [...]

System Model for MEMS based Laser Ultrasonic Receiver

Wilson W.C., NASA Langley Research Center, US

This paper investigates the system modeling of a MOEMS based Laser Ultrasonic receiver system. See Figure 1 for a block diagram of the system. The LUT receiver is comprised of a laser, and an optical [...]

An Efficient Optical Propagation Technique for Optical MEM Simulation

Kurzweg T.P., Levitan S.P., Martinez J.A., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are [...]

Integrated Modeling of Optical MEMS Subsystems

Stoll R., Plowman T., Winick D., Morris A., Coventor, US

This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, [...]

Optical Propagation Methodologies for Optical MEM Systems

Kurzweg T.P., Levitan S.P., Martinez J.A., Marchand P.J., Shomsky M.T., Chiarulli D.M., University of Pittsburgh, US

In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and [...]