micro-electro-mechanical systems (MEMS)

Hybrid P-Element and Trefftz Method for Capacitance Computation

Gyimesi M., Wang J-S., Ostergaard D.F., ANSYS, Inc., US

The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements - Trefftz formulation to treat open boundary [...]

Investigation of Tetrhedral Automatic Mesh Generation for Finite-Element Simulation of Micro-Electro-Mechanical Switches

Wilson N.M., Pinsky P.M., Dutton R.W., Stanford University, US

Simulation of micro-electro-mechanical systems (MEMS) typically involves the requirement to mesh complex 3-D representations of the geometry. Since proper manual or semi-automated mesh generation requires significant user time and knowledge, there is great interest in [...]

A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation

Wilson N.M., Liang S., Pinsky P.M., Dutton R.W., Stanford University, US

This paper details a technique that exploits domain decom-position and utilizes a combination of 1-D, 2-D, and 3-D process simulation to build physically accurate geometry of micro-electro-mechanical systems (MEMS) for simula-tion. The size and aspect [...]