The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements – Trefftz formulation to treat open boundary problems; energy based capacitance matrix and lumped capacitance value extraction.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 424 - 428
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems