MEMS – Page 19 – TechConnect Briefs

Displacement Detection using Quantum Mechanical Electron Tunneling in Micro and Nano-electro-mechanical Systems

Taylor D., Ekinci K., Boston University, US

Micro-electro-mechanical systems (MEMS) and, more recently, nanoelectromechanical systems (NEMS) are emerging as candidates for a number of important technological applications — such as ultra-fast actuators, sensors, and high frequency signal processing components. Experimentally, they are [...]

Effective Modelling and Simulation of Over-Heated Actuators

Zubert M., Napieralska M., Napieralski A., Noullet J.L., Technical University of Lodz, PL

A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been [...]

Computational Prototyping of an RF MEMS Switch using Chatoyant

Bails M., Martinez J.A., Levitan S.P., Avdeev I., Lovell M., Chiarulli D.M., University of Pittsburgh, US

In this paper we demonstrate the capabilities of our system-level CAD tool, Chatoyant, to model and simulate an RF MEMS switch. Chatoyant is a mixed signal, multi-domain CAD tool that can be used to design [...]

New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems

Avdeev I., Gyimesi M., Lovell M., Ostergaard D., University of Pittsburgh, US

Increased functionality of microelectromechanical systems (MEMS) has lead to the development of micro-scale devices that are geometrically complex. These complex configurations require the development of new and more efficient finite element (FE) techniques for modeling [...]

Using Topology Derived Masks to Facilitate 3D Design

Schiek R., Schmidt R., Sandia National Laboratories, US

To accelerate MEMS design for surface micromachining applications, an algorithm and associated design tool have been created which translates designers’ 3D models into 2D lithographic production masks. Typically, designing a surface micromachined, MEMS device requires [...]

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Musson L.C., Ho P., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]

Keywords: MEMS

Displacement Detection using Quantum Mechanical Electron Tunneling in Micro and Nano-electro-mechanical Systems

Effective Modelling and Simulation of Over-Heated Actuators

Computational Prototyping of an RF MEMS Switch using Chatoyant

New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems

Using Topology Derived Masks to Facilitate 3D Design

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Inverse RIE Lag of Silicon Deep Etching

Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

Smart, Intelligent and Cogent Microsensors – Intelligence for Sensors and Sensors for Intelligence

System Issues in Arrays of Autonomous Intelligent Sensors