Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process
Guth H., Hellmann A., Sieber I., Eggert H., Mohr J., Nakajima H., Tanimot K., Usami T., Forschungszentrum Karlsruhe GmbH, DE
The aim of the presented work is to simulate and validate an ultra miniaturized optical distance sensor, which works by means of triangulation. The sensor is dedicated for a detection range of 1 to 6mm [...]