large-displacement model – TechConnect Briefs

Compact Large-Displacement Model for Capacitive Accelerometer

Veijola T., Kuisma H., Lahdenperä J., Helsinki University of Technology, FI

A compact large-displacement model for a gas damped capacitive accelerometer is presented. The gas-film model has been derived from the modified nonlinear Reynolds equation, where the in uence of the gas rarefaction is included. The [...]