High-Sensitivity and Low-Hysteresis Inter-digital Type Capacitive Humidity Sensor on Glass Substrate by Aerosol Deposited BaTiO3
Kim E.S., Kim N.Y., Wang C., Wang Z.J., Wang C., Wang Z.J., Yao Z., Liang J.G., Kim E.S., Kim N.Y., Kwangwoon University, KR
A high-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor is fabricated using Aerosol deposition (AD) of BaTiO3 films. Aerosol deposition (AD) uses shock-loading-solidification preparation mechanism as a novel ceramic film preparation technique, exhibiting the advantages [...]