High-Sensitivity and Low-Hysteresis Inter-digital Type Capacitive Humidity Sensor on Glass Substrate by Aerosol Deposited BaTiO3

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A high-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor is fabricated using Aerosol deposition (AD) of BaTiO3 films. Aerosol deposition (AD) uses shock-loading-solidification preparation mechanism as a novel ceramic film preparation technique, exhibiting the advantages of room-temperature operation and highly efficient film growth. AD is utilized to deposit BaTiO3 films on a glass substrate with a Pt inter-digital capacitor to perform sensing performance by post-annealing at effective temperatures of 500℃. The hygroscopic BaTiO3 film aerosol deposited with BaTiO3 powder has a super mesoporous structure – shows excellent hysteresis under a wide humidity sensing range with good long-term stability. The 1.5-μm-BaTiO3 film exhibited excellent humidity sensing properties, a quick response and recovery. Finally, a good temperature-independent and stable capacitance value of inter-digital type capacitive humidity sensor is a sufficient value for use as a reliable humidity sensor in various applications.

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Journal: TechConnect Briefs
Volume: 3, Biotech, Biomaterials and Biomedical: TechConnect Briefs 2018
Published: May 13, 2018
Pages: 231 - 234
Industry sector: Sensors, MEMS, Electronics
Topics: Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-0-1