gratings – TechConnect Briefs

Experiments and Simulations of Infrared Transmission by Transverse Magnetic Mode through Au Gratings on Silicon with Various Air-slot Widths over the Period

Chen Y-R, Kuan C.H., National Taiwan University, TW

Au gratings with various air-slot widths were fabricated experimentally by electron beam lithography system (e-beam) and their infrared (2.5~25 m) transmission of the transverse magnetic mode (TM mode) were investigated by the Fourier Transform Infrared [...]

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

Cooper A.W., Docker P.T., Ward M.C., The University of Birmingham, UK

This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator [...]