FIB – TechConnect Briefs

The Effect of Sintering Conditions on the Formation of Hydroxyapatite-Boron Nitride Nanocomposites

Bakan F., Sezen M., Goncu Y., Ay N., Gecgin M., Sabanci University, TR

Being the main inorganic constitution of hard tissues (bone and teeth),calcium phosphates has been applied in medical and dental applications in hard tissue repair. Hydroxyapatite (HAp) ceramics have attracted attention because of their excellent osteoconductive [...]

Milling Process Control with Dimensional Feedback on a Focused Ion Beam – Scanning Electron Microscope System (FIB-SEM)

Sanabia J.E., Raith USA, Inc., US

In nanofabrication and nanoanalysis, focused ion beam – scanning electron microscope (FIB-SEM) systems are increasingly used for demanding patterning tasks which rely on precise pattern placement and/or dimension control. Easily verifying and correcting for patterning [...]

Application of focused ion beam technology for photonic nanostructures

Ay F., Gadgil V.J., Geskus D., Aravazhi S., Wörhoff K., Pollnau M., MESA+ institute of nanotechnology, University of Twente, NL

Al2O3 and KY(WO4)2 are promising materials for photonic applications with excellent optical properties and of interest for obtaining on chip resonator structures. However, there is no method available to fabricate these structures except FIB technology. [...]

Silicon Nanostructure Fabrication by Direct FIB Writing and TMAH Wet Chemical Etching

Sievilä P., Chekurov N., Tittonen I., Aalto University, FI

The development of nanotechnology based devices requires rapid prototyping methods that can be applied in combination with well-known clean room processing techniques. We show that focused ion beam (FIB) Ga+-ion implantation can be used to [...]

Focused Ion Beam machining of large and complex nanopatterns

Wilhelmi O., Roussel L, Anzalone P., Stokes D.J., Faber P., Reyntjens S., FEI Company, NL

Modern FIB columns have not only reduced minimum spot sizes, but has also improved beam profiles at large and intermediate FIB currents. Focused ion beams with high beam currents and yet small spot sizes and [...]

A 20 µm Movable Micro Mobile

Jeon J., Lee J.B., Kim M-J, The University of Texas at Dallas, US

We present design, fabrication, and characterization of an extremely small (20x14 µm) movable 3D micro vehicle. The micro mobile was fabricated using a combination of focused-ion-beam (FIB) for micro/nano parts production, atomic layer deposition (ALD) [...]

Keywords: FIB

The Effect of Sintering Conditions on the Formation of Hydroxyapatite-Boron Nitride Nanocomposites

Milling Process Control with Dimensional Feedback on a Focused Ion Beam – Scanning Electron Microscope System (FIB-SEM)

Application of focused ion beam technology for photonic nanostructures

Silicon Nanostructure Fabrication by Direct FIB Writing and TMAH Wet Chemical Etching

Focused Ion Beam machining of large and complex nanopatterns

A 20 µm Movable Micro Mobile

Nanoscale Resolution Deformation Measurements at Crack Tips of Nanostructured Materials and Interface Cracks

Fabrication and optical properties of nanoscale arrays of Au and Pd in polymers

Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Nano-Scale

New Characterisation Techniques for the Study of Nanoscale Polymeric Systems in Two- & Three-Dimensions