electrothermal – TechConnect Briefs

In-Plane Micropump: Design Optimization

Lee W.H., Sin J., Stephanou H.E., RPI, US

This paper presents the fabrication, analysis and optimization of a novel monolithically fabricated diaphragm micropump, referred to as an in-plane micropump. Compared to previous technology, the micropump in this paper is fabricated to have all [...]

Modeling Electrothermal Plastic Deformation

Ellis M., Geisberger A., Sarkar N., Skidmore G., Zyvex Corporation, US

Self-assembly of three-dimensional microstructures has been achieved using EPDA (Electrothermal Plastic Deformation Assembly). The EPDA process, in this case, is dependent on gold yielding within a gold and polysilicon bimorph. To plastically deform the bimorph [...]