electrostatic actuation – TechConnect Briefs

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications

Chakraborty S., Bhattacharyya T.K., Indian Institute of Technology (IIT), Kharagpur, IN

This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to [...]

Design of Multi – Dimensional Variable Capacitors for RF MEMS

Lamba V.K., Engles D., Malik S.S., Gupta A., HCTM Kaithal, IN

Abstract— In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. The RF MEMS variable capacitor is designed [...]

Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements

You J., Packirisamy M., Stiharu I., Concordia University, CA

In general, this paper presents the deduced analytical model and numerical simulation of electrostatically actuated torsional micromirrors with two symmetrical side springs of multiple rotational serpentine elements. Modelling of these kinds of micromirrors is carried [...]

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

Bochobza-Degani O., Elata D., Nemirovsky Y., Electrical Engineering Department, Technion, IL

This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under [...]

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Pelesko J.A., Bernstein D.H., McCuan J., University of Delaware, US

We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

Bochobza-Degani O., Elata D., Nemirovsky Y., Electrical Engineering Department, Technion, IL

This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under [...]

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Pelesko J.A., Bernstein D.H., McCuan J., University of Delaware, US

We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.

Computation Speedup of Macromodels for Dynamic Simulation of Microsystem

Lin W.Z., Lee K.H., Lim S.P., Institute of High Performance Computing, SG

A doubly clamped microbeam actuated by electrostatic force with squeezed gas film damping is a well-known micro device for many researchers to demonstrate how reduced-order dynamic macromodels are an effective way to faithfully capture the [...]

An Efficient Numerical Algorithm for Extracting Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes

Elata D., Bochobza-Degani O., Nemirovsky Y., Technion – Israel Institute of Technology, IL

In this work the stability of electrostatic actuators with multiple uncoupled voltage sources applied to separate isolated excitation electrodes is analyzed. These electrodes are used to drive a continuous deformable element. A novel computational strategy [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]