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HomeKeywordselectro micro metrology

Keywords: electro micro metrology

A More Accurate and Precise Method to Calibrate Atomic Force Microscope (AFM) Cantilevers

Clark J.V., Auburn University, US
This paper presents a method for using a calibrated microelectromechanical system (MEMS) device to calibrate an atomic force microscope (AFM) cantilever. Measure- ments of stiffness and deflection can be made with quantifiable uncertainty. The popular [...]

SUGARX: A Online Tool That Bridges the Gap Between Experiment and Simulation

Marepalli P., Li F., Clark J.V., Purdue University, US
We present a pioneering online tool called SugarX that, for the first time, bridges the gap between experiment and simulation. Our tool is available online at nanoHUB.org with remote experimental control and simulation. A web [...]

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