RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors
Salomonsson A., Roy S., Aulin C., Ojamäe L., Käll P.-O., Strand M., Sanati M., Lloyd Spetz A., IFM, SE
Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).