Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM
Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]