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HomeKeywordsCMOS-MEMS

Keywords: CMOS-MEMS

Tungsten for CMOS-MEMS Pirani and Ionization Vacuum Gauges

Wang J., Tang Z., Dalian University of Technology, CN
Tungsten is consider to be the most suitable material for the CMOS-MEMS vacuum gauges, including Pirani vacuum gauge and ionization vacuum gauge, due to its high temperature coefficient, resistant to the electromigration failure, high melting [...]

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US
This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Characterization of An Integrated 3-Axis CMOS-MEMS Accelerometer

Qu H., Fang D., Xie H., Oakland University, US
This paper reports an integrated 3-axis CMOS-MEMS accelerometer with single proof mass. Sensor design, fabrication process are introduced and detailed characterization of this small-sized accelerometer is addressed. Compared to the previously reported 3-axis accelerometers, most [...]

Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures

Liu J., Fedder G.K., Sassolini S., Sarkar N., Carnegie Mellon University, US
A new Young’s modulus test structure has been designed and used in our lab. Simple models have been built in simulating lateral and vertical stress gradients. Test structures, measurements and FEA simulations are reported on [...]

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

Latorre L., Beroulle V., Nouet P., LIRMM, FR
This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US
This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US
This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US
This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

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