cantilever beams – TechConnect Briefs

Multi-cantilever array sensor system with MOEMS read-out

Bieniek T., Instytut Technologii Elektronowej, PL

Cantilever beams-based sensor systems become a sensor family applicable in several high-end technology research areas. The outstanding sensitivity and phenomenon selectivity of such systems profits from functionalization technique available for cantilever beams surface. High selectivity [...]

A Novel Silicon-based Wideband Nano Switch for RF Applications

Yang Y.X., Ramer R., University of New South Wales (UNSW), AU

This paper presents, for the first time, a silicon-based wideband RF nano switch with simulation fabrication measurement and analysis. Port-to-port simulation results of the RF nano switch indicate that the designed switch has a potential [...]

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

Lam T., Darling R.B., University of Washington, US

A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have [...]

Modeling of Focused Ion Beam Trimming of Cantilever Beams

Lam T., Darling R.B., Univeristy of Washington, US

A finite element model of the cantilever beam is implemented to include a non-uniform thickness along its length, due to focused ion beam trimming. A quasi-static, iterative approach is used to calculate the cantilever profile [...]