bimorph – TechConnect Briefs

Analysis and Simulation of Curved Bimorph Microactuators

Pal S., Xie H., University of Florida, US

Difference in strains in the two layers of a bimorph causes it to curl, thereby leading to actuation. Thermal, piezoelectric and shape-memory alloy based straight bimorph actuators have been widely reported. However, little attention has [...]

High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm

Choe Y., Chen S.J., Kim E.S., University of Southern California, US

This paper describes a microspeaker (composed of a 8mm square mechanically-polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 11 kHz. A bimorph diaphragm is formed by [...]

Modeling Electrothermal Plastic Deformation

Geisberger A., Sarkar N., Ellis M., Skidmore G., Zyvex Corporation, US

Self-assembly of three-dimensional microstructures has been achieved using EPDA (Electrothermal Plastic Deformation Assembly). The EPDA process, in this case, is dependent on gold yielding within a gold and polysilicon bimorph. To plastically deform the bimorph [...]