Atomic force microscope – Page 2

AFM Anodization Studied by Spectromicroscopy

Lazzarino M., Mori G., Ercolani D., Ressel B., Colli A., Sorba L., Locatelli A., Cherifi S., Ballestrazzi A., Heun S., Laboratorio TASC INFM, IT

The fabrication of state-of-the-art semiconductor nanostructures is of great interest both for fundamental physics and device applications. Besides the traditional lithography techniques, local anodic oxidation by atomic force microscopy (AFM) is emerging because of its [...]

Local Oxidation Characteristics of Single Crystal Silicon

Ichida Y., Morimoto Y., Sato R., Saito N., Utsunomiya University, JP

Recently, the surface modification with an atomic force microscope (AFM) has attracted special interest as one of the surface processing techniques in a nanometer scale and investigated vigorously [1]. The nanometer-scale scratching (nanoscratching) that removes [...]

Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer

Ichida Y., Morimoto Y., Sato R., Murakami M., Utsunomiya University, JP

In recent years, the surface modification with an atomic force microscope (AFM) has attracted special interest as one of the surface processing techniques in a nanometer scale [1-3]. Particularly, this technique will play an increasingly [...]

Design, Fabrication and Experimental-Numerical Study of PZT Sensors

Arik M., Zurnx S.M., Yigit K.S., Bar-Cohen A., University of Minnesota, US

MEMS micropumps, based on PZT membranes have been designed and fabricated at the Microtechnology Laboratory of the University of Minnesota for use in fluid flow control, and as chemical and pressure sensors. Design, fabrication and [...]

Development of CAD Model for MEMS Micropumps

Arik M., Zurn S.M., Bar-Cohen A., Nam Y., Markus D., Polla D., Univeristy of Minnesota, US

This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported [...]