Xie L. – TechConnect Briefs

Investigation on correlation between cold/hot weld line mechanical properties and micro injection molding processing parameters

Xie L., Zhu D., Ziegmann G., Steuernagel L., Technology University of Clausthal, DE

Micro injection molding has been attracting more and more market attentions, due to realizing the large scale cost effective production of Micro Electronic Mechanic System (MEMS) components. However, there are some defects which cannot be [...]

Low Temperature Deposition of High-Quality Nanometer-Thick Dielectric Films in an Electron Cyclotron Resonance (ECR) Plasma-Enhanced CVD System

Xie L., Deng J., Shepard S., Tsakirgis J., Chen E., Harvard University, US

One of the challenges facing in nanofabrication is to deposit dielectric films with thickness compared to the feature size under fabrication, typically in a range of nanometer, for the purposes such as gate dielectrics, surface [...]