Stoffels S. – TechConnect Briefs

Passive Temperature-Compensation of MEM Resonators

Rottenberg X., Jansen R., Stoffels S., De Coster J., De Raedt W., De Coster J., De Raedt W., Tilmans H.A.C., IMEC, BE

MEM-resonators are recognized key components for future sensing, wireless and communications applications. Si-based resonators have gained special interest since they offer the perspective to replace bulky quartz resonators on-chip, maintaining high Q-factor and reaching high [...]

Simulations of the Anchor Losses in MEM Disk Resonators

Paci D., Stoffels S., Tilmans H.A.C., IMEC, BE

MEM (Micro Electro Mechanical) resonators have been proposed as fundamental components in RF transmission systems; especially bulk mode resonators are very attractive devices because of their small size and their high resonance frequencies combined with [...]

Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

Stoffels S., Fernández L.J., Puers R., Tilmans H.A.C., IMEC, BE

Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz [...]