Electromechanical Modeling of MEMS Resonators with MOSFET Detection
Abelé N., Pott V., Boucart K., Casset F., Séguéni K., Ancey P., Ionescu A.M., Swiss Federal Institute of Technology of Lausanne, CH
This work reports on analytical modeling and investigation of Resonant Suspended-Gate MOSFETs (RSG-MOSFET) as future solutions for RF applications including MEMS and ICs. Pure metal-metal capacitive detection for resonators is shown to be the most [...]