Schmid P. – TechConnect Briefs

Simulation of a Diamond-Based Bistable Thermal Microswitch

Schmid P., Hernandez-Guillen F.J., Kohn E., University of Ulm, DE

A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]

Modeling of High-speed Diamond Microswitch

Schmid P., Adamschik M., Ertl S., Kohn E., University of Ulm, DE

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]

Modeling Approach for CVD-Diamond Based Mechanical Structures

Schmid P., Adamschik M., Ertl S., Gluche P., Kohn E., University of Ulm, DE

In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated [...]