Record resistivity for in-situ grown horizontal carbon nanotubes interconnects
Dijon J., Ramos R., Fournier A., Fournier H., Le Poche H., Fournier A., Fournier H., Okuno H., Simonato J-P, CEA-Liten, FR
Carbon in the form of nanotubes (CNTs) and graphene is the only known material that can replace copper in integrated circuits to carry the high current densities associated with advanced interconnects. Its implementation is however [...]