Park J.Y. – TechConnect Briefs

Atomic Scale Understanding of Intermixing Behavior of Thin Metal Multilayer

Kim S.-P., Park J.Y., Lee K-R, Lee S-C, Lee K-R, Lee S-C, Chung Y.-J., Whang C.N., Korea Institute of Science and Technology, KR

We investigated the intermixing behavior of Co-Al thin layers by a molecular dynmaic simulation. Asymmetic intermixing was observed: a severe intermixing occurs when Co was deposited on Al substrate while an atomically sharp interface forms [...]

Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique

Park J.Y., Kim K.T., Moon S., Pak J.J., Korea Institute of Science and Technology, KR

This paper describes the novel UV-Lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator(MRPBI) system, fabrication of 3D feed horn MEMS antennas plate using plastic [...]