Oldham W.G. – TechConnect Briefs

Modeling and Control of Nanomirrors for EUV Maskless Lithography

Chen Y., Shroff Y., Oldham W.G., University of California, US

The design of mirrors for use in EUV maskless lithography is presented in this paper. We propose a novel nanomirror system with a linear comb actuator, which has favorable stability and performance. A bias voltage [...]

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators

Chen Y., Shroff Y., Oldham W.G., University of California, US

The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape [...]