Neels A. – TechConnect Briefs

Advanced In- and Out-off plane High Resolution X-ray Strain Analysis on MEMS

Related to the dramatically smaller volume of microelectromecanical systems (MEMS), new methods in testing and qualification are needed. In single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects during the MEMS [...]

In-situ MEMS Testing

Dommann A., Neels A., Schifferle A., Mazza E., CSEM, CH

In microsystems technology, new methods in testing and qualification are needed related to the dramatically smaller volume of microelectromecanical systems (MEMS). In single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects [...]