Liu J.F. – TechConnect Briefs

A Highly Reliable Pattern Transfer of Hydrogen Silsequioxane

Liu J.F., Chen H.J.H., Chen S.Z., Chen H.J.H., Chen S.Z., Huang F.S., National Tsing Hua University, TW

In this paper, we focus on the effects of process parameters on pattern embossing into HSQ films, and the pattern degradation of HSQ for room temperature aging effects. The dilution of HSQ affects not only [...]

Au Nano-Wire Transferring onto HSQ by Nano Imprinting Technology

Liu J.F., Hsu Y.J., Chen J.H., Chen S.Z., Huang F.S., Chen J.H., Chen S.Z., National Tsing Hua University, TW

In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable [...]